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Design and control of a single-chip SOI-MEMS atomic force microscope
- Maroufi, Mohammad, Ruppert, Michael G., Fowler, Anthony G., Moheimani, S. O. Reza
Kalman filter enabled high-speed control of a MEMS nanopositioner
- Ruppert, Michael G., Maroufi, Mohammad, Bazaei, Ali, Moheimani, S. O. Reza
On-chip dynamic mode atomic force microscopy: a silicon-on-insulator MEMS approach
- Ruppert, Michael G., Fowler, Anthony G., Maroufi, Mohammad, Moheimani, S. O. Reza
Tracking control of constant-linear-velocity spiral reference by LQG method
- Bazaei, Ali, Maroufi, Mohammad, Moheimani, S. O. Reza
Tracking of constant-linear-velocity spiral trajectories by approximate internal model control
A 2DOF SOI-MEMS nanopositioner with tilted flexure bulk piezoresistive displacement sensors
- Maroufi, Mohammad, Moheimani, S. O. Reza
Cross coupling in parallel kinematic MEMS nanopositioners
Internal model control for spiral trajectory tracking with MEMS AFM scanners
- Bazaei, Ali, Maroufi, Mohammad, Fowler, Anthony G., Moheimani, S. O. Reza
On the modeling of tilted fixed-guided flexible beams under tension
A high-bandwidth MEMS nanopositioner for on-chip AFM: design, characterization, and control
- Maroufi, Mohammad, Bazaei, Ali, Moheimani, S. O. Reza
Design and control of a MEMS nanopositioner with bulk piezoresistive sensors
- Maroufi, Mohammad, Yong, Y. K., Moheimani, S. O. Reza
High-stroke silicon-on-insulator MEMS nanopositioner: control design for non-raster scan atomic force microscopy
- Maroufi, Mohammad, Fowler, Anthony G., Bazaei, Ali, Moheimani, S. O. Reza
MEMS nanopositioner for on-chip atomic force microscopy: a serial kinematic design
- Maroufi, Mohammad, Fowler, Anthony G., Reza Moheimani, S. O.
MEMS-based nanopositioning for on-chip high-speed scanning probe microscopy
- Maroufi, Mohammad
Noise resilient 2-DoF washout tracking controller for nanopositioning systems subject to sensor drift
Note: a silicon-on-insulator microelectromechanical systems probe scanner for on-chip atomic force microscopy
- Fowler, Anthony G., Maroufi, Mohammad, Moheimani, S. O. Reza
Tilted beam piezoresistive displacement sensor: design, modeling, and characterization
- Maroufi, Mohammad, Bazaei, Ali, Mohammadi, Ali, Moheimani, S. O. Reza
Tracking of spiral trajectories beyond scanner resonance frequency by a MEMS nanopositioner
- Bazaei, Ali, Fowler, Anthony G., Maroufi, Mohammad, Moheimani, S. O. Reza
Development of a MEMS position transducer using bulk piezoresistivity of suspensions
- Bazaei, Ali, Maroufi, Mohammad, Mohammadi, Ali, Moheimani, S. O. Reza
Displacement sensing with silicon flexures in MEMS nanopositioners
- Bazaei, Ali, Maroufi, Mohammad, Mohammadi, Ali, Moheimani, S. O. R.
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